Product Development » Tel Epion, Inc.

Tel Epion, Inc. is a supplier of gas cluster ion beam technology for diverse semiconductor applications and emerging nanotechnology markets. It is a wholly owned sub division of Tokyo Electron, the leading global supplier of semiconductor production equipment. ADM has worked with both Tokyo Electron and Epion as separate companies, and continue to do so ever since they've merged.

Tel Epion, Inc.

The services we provide for Tel Epion are:

• On site technicians that help with fluctuating manufacturing schedules
• The construction of all platforms
• Turnkey contract manufacturing
• Harnessing
• Cabling

One example of a product that ADM has contributed to is the Gas Cluster Ion Beam (GCIB) System. This product is built for infusion doping and dose controlled deposition. The GCIB is made up of two parts, the nFusion System and the Ultra-Trimmer System.

The features of the nFusion system include:

• Utilizing a GCIB source to produce a directed energetic chemical beam.
• Dopant-containing gas species can be introduced into this chemical beam and become incorporated into a substrate.
• Infusion processing is ultra shallow, high rate, and occurs at room temperature.

The features of the Ultra-Trimmer System include:

• Provides a precisely controlled, focused reactive beam to provide extremely accurate localized surface etching.
• Minimizes or completely removes non-uniformities on surfaces or by adjusting the amount etched over each location on a substrate.
• Flexible wafer handling.

Click here to read more about the GCIB system

Product Development » Tel Epion, Inc.